Resolution of direct space charge distribution measurement methods

被引:34
作者
Hole, Stephane [1 ]
机构
[1] Univ Paris 06, ESPCI, LEG 10, Lab Instruments & Syst Ile France, F-75005 Paris, France
关键词
spatial resolution; sensitivity; space charge distribution; measurement method; thermal method; pressure-wave-propagation method; electroacoustic method;
D O I
10.1109/TDEI.2008.4543124
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Spatial resolution is a key parameter for the measurement of any distribution. In the case of space charge distribution measurements, it is difficult to compare technique performances since each technique has its own resolution definition most of the time. In this paper the resolution, in terms of position accuracy and charge discernment, is determined on the basis of a unique definition for the thermal, the pressure-wave-propagation and the electro-acoustic methods and their derived techniques. It is shown that spatial resolution is similar throughout the sample in. the case of the pressure-wave-propagation or the electro-acoustic methods, except if attenuation and dispersion of elastic waves are important, but decreases as the charge position inside the sample in the case of thermal method. Elastic wave methods are therefore preferable for a given signal to noise ratio as soon as the sample thickness is larger than twice the sound velocity times the excitation rise time.
引用
收藏
页码:861 / 871
页数:11
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