Simulation of silicon micromachined ultrasonic transducers

被引：1
|
作者：
Ge, LF [1 ]
机构：
[1] Anhui Univ, Sch Comp Sci & Informat Engn, Hefei 230039, Peoples R China
来源：
FIFTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY | 2003年 / 5253卷
关键词：
ultrasonic transducer; silicon micromachined; electrostatic; capacitive; simulation; modeling;
D O I：
10.1117/12.521356
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A general 3-D TDK model developed further in this paper has been successfully applied to simulate a surface micromachimned electrostatic or capacitive ultrasonic transducer with vacuum-sealed air-cavities (i.e cMUT). Also, the paper gives a reliable prediction of resonant and anti-resonant frequencies of a typical cMUT.
引用
收藏
页码：15 / 18
页数：4
相关论文
共 50 条
  • [1] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, BT
    Degertekin, FL
    Jin, XC
    Calmes, S
    Ladabaum, I
    Hansen, S
    Zhang, XJ
    1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 985 - 991
  • [2] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, BT
    Cheng, CH
    Degertekin, FL
    Ergun, S
    Hansen, S
    Jin, XC
    Oralkan, O
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (5B): : 2883 - 2887
  • [3] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, Butrus T.
    Cheng, Ching-Hsiang
    Degertekin, Fahrettin-Levent
    Ergun, Sanli
    Hansen, Sean
    Jin, Xue-Cheng
    Oralkan, Omer
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2000, 39 (5 B): : 2883 - 2887
  • [4] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, B.T.
    Degertekin, F.L.
    Jin, X.-C.
    Calmes, S.
    Ladabaum, I.
    Hansen, S.
    Zhang, X.J.
    Proceedings of the IEEE Ultrasonics Symposium, 1998, 2 : 985 - 991
  • [5] Silicon micromachined ultrasonic immersion transducers
    Soh, HT
    Ladabaum, I
    Atalar, A
    Quate, CF
    KhuriYakub, BT
    APPLIED PHYSICS LETTERS, 1996, 69 (24) : 3674 - 3676
  • [6] Theoretical simulation of the behavior of micromachined electrostatic ultrasonic transducers
    Ge, LF
    THEORETICAL AND COMPUTATIONAL ACOUSTICS 2001, 2002, : 459 - 469
  • [7] Porous Silicon as Backing Material for Capacitive Micromachined Ultrasonic Transducers
    Lascaud, Julie
    Boulme, Audren
    Gross, Dominique
    Bahette, Emilie
    Defforge, Thomas
    Alquier, Daniel
    Gautier, Gael
    Certon, Dominique
    2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2016,
  • [8] Novel silicon nitride micromachined wide bandwidth ultrasonic transducers
    Noble, RA
    Bozeat, RJ
    Robertson, TJ
    Billson, DR
    Hutchins, DA
    1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 1081 - 1084
  • [9] Ultrasonic measurements on micromachined transducers
    Andrews, MK
    Harris, PD
    Turner, GC
    EUROSENSORS XII, VOLS 1 AND 2, 1998, : 117 - 120
  • [10] Curved micromachined ultrasonic transducers
    Wong, KA
    Panda, S
    Ladabaum, I
    2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 572 - 576
12345