Bringing Electrochemical Three-Dimensional Printing to the Nanoscale

被引:70
作者
Hengsteler, Julian [1 ]
Mandal, Barnik [1 ]
van Nisselroy, Cathelijn [1 ]
Lau, Genevieve P. S. [2 ]
Schlotter, Tilman [1 ]
Zambelli, Tomaso [1 ]
Momotenko, Dmitry [1 ,3 ]
机构
[1] Swiss Fed Inst Technol, Inst Biomed Engn, Lab Biosensors & Bioelect, CH-8092 Zurich, Switzerland
[2] Nanyang Technol Univ, Sch Phys & Math Sci, Div Chem & Biol Chem, Singapore 637371, Singapore
[3] Carl von Ossietzky Univ Oldenburg, Dept Chem, D-26129 Oldenburg, Germany
基金
瑞士国家科学基金会; 欧洲研究理事会;
关键词
meniscus-confined; electrodeposition; additive manufacturing; nanopipette; metal printing; FOCUSED ELECTRON-BEAM; 3D; ELECTRODEPOSITION; DEPOSITION;
D O I
10.1021/acs.nanolett.1c02847
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanoscale 3D printing is attracting attention as an alternative manufacturing technique for a variety of applications from electronics and nanooptics to sensing, nanorobotics, and energy storage. The constantly shrinking critical dimension in state-of-the-art technologies requires fabrication of complex conductive structures with nanometer resolution. Electrochemical techniques are capable of producing impurity-free metallic conductors with superb electrical and mechanical properties, however, true nanoscale resolution (<100 nm) remained unattainable. Here, we set new a benchmark in electrochemical 3D printing. By employing nozzles with dimensions as small as 1 nm, we demonstrate layer-by-layer manufacturing of 25 nm diameter voxels. Full control of the printing process allows adjustment of the feature size on-the-fly, printing tilted, and overhanging structures. On the basis of experimental evidence, we estimate the limits of electrochemical 3D printing and discuss the origins of this new resolution frontier.
引用
收藏
页码:9093 / 9101
页数:9
相关论文
共 28 条
[1]  
Aaronson BDB, 2015, NANOELECTROCHEMISTRY, P655
[2]   Role of reaction kinetics and mass transport in glucose sensing with nanopillar array electrodes [J].
Anandan V. ;
Yang X. ;
Kim E. ;
Rao Y.L. ;
Zhang G. .
Journal of Biological Engineering, 1 (1)
[3]   Localized Pulsed Electrodeposition Process for Three-Dimensional Printing of Nanotwinned Metallic Nanostructures [J].
Daryadel, Soheil ;
Behroozfar, Ali ;
Morsali, S. Reza ;
Moreno, Salvador ;
Baniasadi, Mahmoud ;
Bykova, Julia ;
Bernal, Rodrigo A. ;
Minary-Jolandan, Majid .
NANO LETTERS, 2018, 18 (01) :208-214
[4]   3D-Printed Soft Magnetoelectric Microswimmers for Delivery and Differentiation of Neuron-Like Cells [J].
Dong, Mei ;
Wang, Xiaopu ;
Chen, Xiang-Zhong ;
Mushtaq, Fajer ;
Deng, Siyu ;
Zhu, Caihong ;
Torlakcik, Harun ;
Terzopoulou, Anastasia ;
Qin, Xiao-Hua ;
Xiao, Xuanzhong ;
Puigmarti-Luis, Josep ;
Choi, Hongsoo ;
Pego, Ana Paula ;
Shen, Qun-Dong ;
Nelson, Bradley J. ;
Pane, Salvador .
ADVANCED FUNCTIONAL MATERIALS, 2020, 30 (17)
[5]   Evolution of 3D Printing Methods and Materials for Electrochemical Energy Storage [J].
Egorov, Vladimir ;
Gulzar, Umair ;
Zhang, Yan ;
Breen, Siobhan ;
O'Dwyer, Colm .
ADVANCED MATERIALS, 2020, 32 (29)
[6]   Atomic Force Microscope-Based Meniscus-Confined Three-Dimensional Electrodeposition [J].
Eliyahu, David ;
Gileadi, Eliezer ;
Galun, Ehud ;
Eliaz, Noam .
ADVANCED MATERIALS TECHNOLOGIES, 2020, 5 (02)
[7]   Additive Manufacturing of Sub-Micron to Sub-mm Metal Structures with Hollow AFM Cantilevers [J].
Ercolano, Giorgio ;
van Nisselroy, Cathelijn ;
Merle, Thibaut ;
Voros, Janos ;
Momotenko, Dmitry ;
Koelmans, Wabe W. ;
Zambelli, Tomaso .
MICROMACHINES, 2020, 11 (01)
[8]   Multiscale Additive Manufacturing of Metal Microstructures [J].
Ercolano, Giorgio ;
Zambelli, Tomaso ;
van Nisselroy, Cathelijn ;
Momotenko, Dmitry ;
Voros, Janos ;
Merle, Thibaut ;
Koelmans, Wabe W. .
ADVANCED ENGINEERING MATERIALS, 2020, 22 (02)
[9]   Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy [Invited] [J].
Fischer, Joachim ;
Wegener, Martin .
OPTICAL MATERIALS EXPRESS, 2011, 1 (04) :614-624
[10]   65 nm feature sizes using visible wavelength 3-D multiphoton lithography [J].
Haske, Wojciech ;
Chen, Vincent W. ;
Hales, Joel M. ;
Dong, Wenting ;
Barlow, Stephen ;
Marder, Seth R. ;
Perry, Joseph W. .
OPTICS EXPRESS, 2007, 15 (06) :3426-3436