Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering

被引：3
|
作者：
Wang, Xuan [1 ]
Zhang, Kui [1 ]
Yue, Guanghui [1 ]
Peng, Dongliang [1 ]
Qi, Zhengbing [2 ]
Wang, Zhoucheng [2 ]
机构：
[1] Xiamen Univ, Coll Mat, Xiamen, Peoples R China
[2] Xiamen Univ, Coll Chem & Chem Engn, Xiamen, Peoples R China
来源：
MATERIALS PROCESSING TECHNOLOGIES, PTS 1 AND 2 | 2011年 / 154-155卷
关键词：
TiAlN; coatings; vapor deposition; microstructure; hardness; FILMS; LAYER;
D O I：
10.4028/www.scientific.net/AMR.154-155.1639
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
TiAIN coatings have been deposited by reactive magnetron sputtering from TiAl alloy target using a direct current (DC) power source. The crystal structure, chemical composition, surface morphology and hardness of TiAIN coatings which were prepared at various N-2 flow rates have been systemically investigated. The results show a strong effect of N-2 flow rates on the orientation, grain size and densification in TiAlN coatings. The TiAlN coating shows the highest hardness at a certain N-2 flow rate when it has the most compact structure.
引用
收藏
页码：1639 / +
页数：2
相关论文
共 50 条
  • [1] STRUCTURAL AND MECHANICAL PROPERTIES OF TiAlN AND TiAlN GRADIENT FILMS DEPOSITED BY REACTIVE PULSED DC MAGNETRON SPUTTERING
    Aiempanakit, Montri
    Rukkun, Jariyaporn
    Reakaukot, Pimchanok
    Wongpisan, Witthawat
    Waree, Kirati
    Aiempanakit, Kamon
    SURANAREE JOURNAL OF SCIENCE AND TECHNOLOGY, 2023, 30 (02):
  • [2] Mechanical and tribological properties of nanostructured TiAlN/TaN coatings deposited by DC magnetron sputtering
    Contreras Romero, Elbert
    Hurtado Macias, Abel
    Mendez Nonell, Juan
    Solis Canto, Oscar
    Gomez Botero, Maryory
    SURFACE & COATINGS TECHNOLOGY, 2019, 378
  • [3] Investigation of deposition parameters on the structural properties and hardness of TiAlN films deposited via reactive pulsed DC magnetron sputtering
    Aiempanakit, Kamon
    Rukkun, Jariyaporn
    Reakaukot, Pimchanok
    Wongpisan, Witthawat
    Waree, Kirati
    Aiempanakit, Montri
    JOURNAL OF METALS MATERIALS AND MINERALS, 2021, 31 (02): : 118 - 122
  • [4] The mechanical properties evaluation of the CrN coatings deposited by the pulsed DC reactive magnetron sputtering
    Lee, JW
    Tien, SK
    Kuo, YC
    Chen, CM
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (10): : 3330 - 3335
  • [5] The significance of carbon on the microstructure of TiAlN-C coatings deposited by reactive magnetron sputtering
    Huang, Y. Z.
    Stueber, M.
    Hovsepian, P.
    APPLIED SURFACE SCIENCE, 2006, 253 (05) : 2470 - 2473
  • [6] The property and application of TiAlN coatings by DC magnetron sputtering
    Yang Lifeng
    Liu Weina
    Wang Gang
    Chen Ping
    Zhang Shuren
    Zhao Jinghe
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 4476 - 4479
  • [7] Microstructural and electrochemical properties of TiAlN(Ag,Cu) nanocomposite coatings for medical applications deposited by DC magnetron sputtering
    Mejía H.D.V.
    Echavarría A.M.
    Calderón J.A.
    Gilberto Bejarano G.
    Journal of Alloys and Compounds, 2020, 828
  • [8] Erosion resistance performance of magnetron sputtering deposited TiAlN coatings
    Yang, Q
    Seo, DY
    Zhao, LR
    Zeng, XT
    SURFACE & COATINGS TECHNOLOGY, 2004, 188 : 168 - 173
  • [9] Synthesis and microstructural characterization of nanoscale multilayer TiAlN/TaN coatings deposited by DC magnetron sputtering
    Elbert Contreras
    Gilberto Bejarano
    Maryory Gómez
    The International Journal of Advanced Manufacturing Technology, 2019, 101 : 663 - 673
  • [10] Synthesis and microstructural characterization of nanoscale multilayer TiAlN/TaN coatings deposited by DC magnetron sputtering
    Contreras, Elbert
    Bejarano, Gilberto
    Gomez, Maryory
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2019, 101 (1-4): : 663 - 673
12345