Investigation on the Structure and Properties of TiAlN Coatings Deposited by DC Reactive Magnetron Sputtering

被引：3

作者：

Wang, Xuan ^{[1
]}

Zhang, Kui ^{[1
]}

Yue, Guanghui ^{[1
]}

Peng, Dongliang ^{[1
]}

Qi, Zhengbing ^{[2
]}

Wang, Zhoucheng ^{[2
]}

机构：

[1] Xiamen Univ, Coll Mat, Xiamen, Peoples R China

[2] Xiamen Univ, Coll Chem & Chem Engn, Xiamen, Peoples R China

来源：

MATERIALS PROCESSING TECHNOLOGIES, PTS 1 AND 2 | 2011年 / 154-155卷

关键词：

TiAlN; coatings; vapor deposition; microstructure; hardness; FILMS; LAYER;

D O I：

10.4028/www.scientific.net/AMR.154-155.1639

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiAIN coatings have been deposited by reactive magnetron sputtering from TiAl alloy target using a direct current (DC) power source. The crystal structure, chemical composition, surface morphology and hardness of TiAIN coatings which were prepared at various N-2 flow rates have been systemically investigated. The results show a strong effect of N-2 flow rates on the orientation, grain size and densification in TiAlN coatings. The TiAlN coating shows the highest hardness at a certain N-2 flow rate when it has the most compact structure.

引用

页码：1639 / +

页数：2

共 10 条

[1] Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings
Kim, GS
Lee, SY
Hahn, JH
Lee, BY
Han, JG
Lee, JH
Lee, SY
[J]. SURFACE & COATINGS TECHNOLOGY, 2003, 171 (1-3) : 83 - 90
[2] High temperature oxidation of TiCrN coatings deposited on a steel substrate by ion plating
Lee, DB
Kim, MH
Lee, YC
Kwon, SC
[J]. SURFACE & COATINGS TECHNOLOGY, 2001, 141 (2-3) : 232 - 239
[3] THE DEVELOPMENT OF THE PVD COATING TIALN AS A COMMERCIAL COATING FOR CUTTING TOOLS
LEYENDECKER, T
LEMMER, O
ESSER, S
EBBERINK, J
[J]. SURFACE & COATINGS TECHNOLOGY, 1991, 48 (02) : 175 - 178
[4] Reactive DC magnetron sputtering of elemental targets in Ar/N2 mixtures:: relation between the discharge characteristics and the heat of formation of the corresponding nitrides
Mientus, R
Ellmer, K
[J]. SURFACE & COATINGS TECHNOLOGY, 1999, 116 : 1093 - 1101
[5] Single layer and multilayer wear resistant coatings of (Ti,Al)N: a review
PalDey, S
Deevi, SC
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2003, 342 (1-2): : 58 - 79
[6] Formation of composite ternary nitride thin films by magnetron sputtering co-deposition
Sandu, C. S.
Sanjines, R.
Benkahoul, M.
Medjani, F.
Levy, F.
[J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) : 4083 - 4089
[7] Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems
Takeyama, MB
Itoi, T
Aoyagi, E
Noya, A
[J]. APPLIED SURFACE SCIENCE, 2003, 216 (1-4) : 181 - 186
[8] Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with Hv=80 to ≤ 105 GPa
Veprek, S
Niederhofer, A
Moto, K
Bolom, T
Männling, HD
Nesladek, P
Dollinger, G
Bergmaier, A
[J]. SURFACE & COATINGS TECHNOLOGY, 2000, 133 : 152 - 159
[9] Industrial applications of superhard nanocomposite coatings
Veprek, Stan
Veprek-Heijman, Maritza J. G.
[J]. SURFACE & COATINGS TECHNOLOGY, 2008, 202 (21) : 5063 - 5073
[10] Wei S., 2005, J YANSHAN U, V29, P485

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