Study of diamond film nucleation by ultrasonic seeding in different solutions

被引：28

作者：

Varga, Marian ^{[1
]}

Izak, Tibor ^{[2
]}

Kromka, Alexander ^{[2
]}

Vesely, Marian ^{[1
]}

Hruska, Karel ^{[2
]}

Michalka, Miroslav ^{[3
]}

机构：

[1] Slovak Tech Univ Bratislava, Fac Elect Engn & Informat Technol, Bratislava 81219, Slovakia

[2] VVI, Inst Phys AS CR, CZ-16253 Prague 6, Czech Republic

[3] Ctr Int Laser, Bratislava 81219, Slovakia

来源：

CENTRAL EUROPEAN JOURNAL OF PHYSICS | 2012年 / 10卷 / 01期

关键词：

diamond; nucleation; ultrasonic abrasion; SEM; Raman; NANOCRYSTALLINE DIAMOND; GROWTH; CVD; NANODIAMOND; CATALYST; SILICON; THIN;

D O I：

10.2478/s11534-011-0078-4

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this study we have investigated diamond nucleation on Si substrates by ultrasonic seeding with different liquid solutions of Ultradispersed Detonation Diamond (UDD) powder in a mixture of metal nano- or microparticles (Ni, Co, Y). The influence of different solutions on nucleation efficiency was investigated. For highlighting nucleation centers and better evaluation of the nucleation process the nucleated samples were moved into a Microwave Plasma Enhanced Chemical Vapor Deposition (MW CVD) reactor and a "short-time" (10 min), then followed by a "long-time" (+1 hour), diamond deposition was performed. The morphology of samples was characterized by Scanning Electron Microscopy (SEM) and the chemical composition of grown diamond layer was investigated by Raman Spectroscopy. From the measurements we found out that microsized metal particles positively influenced nucleation and the uniformity of the deposited diamond thin film. The lowest surface roughness was achieved in the case of nanodiamond powder mixed with Co and Y metal powder. The influence of Ni, Co and Y to the nucleation and early growth stage are discussed.

引用

页码：218 / 224

页数：7

共 21 条

[1] Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth [J].

Buijnsters, J. G. ;

Vazquez, L. ;

ter Meulen, J. J. .

[2] The CVD of nanodiamond materials [J].

Butler, James E. ;

Sumant, Anirudha V. .

CHEMICAL VAPOR DEPOSITION, 2008, 14 (7-8) :145-160

[3] Synthesis of carbon nanotubes over Ni- and Co-supported CaCO3 catalysts using catalytic chemical vapor deposition [J].

Hsieh, Chien-Te ;

Lin, Yi-Tien ;

Lin, Jia-Yi ;

Wei, Jing-Long .

MATERIALS CHEMISTRY AND PHYSICS, 2009, 114 (2-3) :702-708

[4] Bias enhanced nucleation of diamond thin films in a modified HFCVD reactor [J].

Izak, T. ;

Marton, M. ;

Varga, M. ;

Vojs, M. ;

Vesely, M. ;

Redhammer, R. ;

Michalka, M. .

VACUUM, 2009, 84 (01) :49-52

[5] Synthesis and growth mechanism of metal filled carbon nanostructures by CVD using Ni/Y catalyst supported on copper [J].

Kang, J. L. ;

Li, J. J. ;

Du, X. W. ;

Shi, C. S. ;

Zhao, N. Q. ;

Cui, L. ;

Nash, P. .

JOURNAL OF ALLOYS AND COMPOUNDS, 2008, 456 (1-2) :290-296

[6] Raman Studies of Nano- and Ultra-nanocrystalline Diamond Films Grown by Hot-Filament CVD [J].

Klauser, Frederik ;

Steinmueller-Nethl, Doris ;

Kaindl, Reinhard ;

Bertel, Erminald ;

Memmel, Norbert .

CHEMICAL VAPOR DEPOSITION, 2010, 16 (4-6) :127-135

[7] Comparison of diamond nucleation in DC and AC substrate bias mode [J].

Kromka, A ;

Janík, J ;

Balon, F ;

Kubovic, M ;

Cerven, I ;

Dubravcová, V .

THIN SOLID FILMS, 2003, 433 (1-2) :73-77

[8] Seeding of polymer substrates for nanocrystalline diamond film growth [J].

Kromka, A. ;

Babchenko, O. ;

Kozak, H. ;

Hruska, K. ;

Rezek, B. ;

Ledinsky, M. ;

Potmesil, J. ;

Michalka, M. ;

Vanecek, M. .

[9]

KROMKA A, 2009, ADV ENG INFORM, V7, P11

[10] Formation of continuous nanocrystalline diamond layers on glass and silicon at low temperatures [J].

Kromka, Alexander ;

Rezek, Bohuslav ;

Remes, Zdenek ;

Michalka, Miroslav ;

Ledinsky, Martin ;

Zemek, Josef ;

Potmesil, Jiri ;

Vanecek, Milan .

CHEMICAL VAPOR DEPOSITION, 2008, 14 (7-8) :181-186

← 1 2 3 →