Fabrication-tolerant 1310 nm laterally coupled distributed feedback lasers with high side mode suppression ratios

被引：18

作者：

Millett, R. ^{[1
]}

Dridi, K. ^{[1
]}

Benhsaien, A. ^{[1
]}

Schriemer, H. ^{[1
]}

Hinzer, K. ^{[1
]}

Hall, T. ^{[1
]}

机构：

[1] Univ Ottawa, Ctr Res Photon, Ottawa, ON K1N 6N5, Canada

来源：

PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS | 2011年 / 9卷 / 02期

关键词：

Distributed feedback lasers; Third-order gratings; Side mode suppression ratio; Stepper lithography; DFB; SIMULATION;

D O I：

10.1016/j.photonics.2011.01.003

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. The lateral grating of the LC-DFB lasers can be patterned along both sidewalls of the ridge waveguide. Gratings with higher order can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. Excellent side mode suppression ratio over 53 dB has been measured with a single mode lasing around 1310 nm. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：111 / 118

页数：8