MEMS-Enabled miniaturized particulate matter monitor employing 1.6 GHz aluminum nitride thin-film bulk acoustic wave resonator (FBAR) and thermophoretic precipitator

被引：27

作者：

Black, Justin P. ^{[1
]}

Elium, Alex ^{[1
]}

White, Richard M. ^{[1
]}

Apte, Michael G. ^{[2
]}

Gundel, Lara A. ^{[2
]}

Cambie, Rossana ^{[2
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[2] Lawrence Berkeley Natl Lab, Berkeley, CA USA

来源：

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年

关键词：

thin-film bulk acoustic wave resonator (FBAR); particulate matter mass sensor; CMOS Pierce oscillator; aerosol; thermophoresis;

D O I：

10.1109/ULTSYM.2007.128

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We describe a miniaturized MEMS particulate matter (PM) monitor that employs the deposition of particulates from a sample stream onto a 1.6 GHz piezoelectric thin-film bulk acoustic wave resonator (FBAR) by means of thermophoresis, and determination of the mass deposited by measuring the resonant frequency shift of a Pierce oscillator. Real-time measurements made in an environmental chamber over several weeks and during a week-long field study in a residence showed excellent correlation with the responses of other commercial aerosol instruments. An added mass of 1 pg could be resolved with the sensor, and the level of detection was 18 mu g / m(3). The monitor weighs 114 g, has a volume of approximately 245 cm 3, consumes less than 100 mW, and would cost less than $100 USD in small quantities. Efforts to further miniaturize the sensor and integrate it with a cell-phone are described.

引用

页码：476 / +

页数：2

共 16 条

[1]

BURNS SG, 1984, IEEE MTT S INT MICR, P83

[2] A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition [J].

Chua, BL ;

Li, Z ;

McCormick, DT ;

Shih, WP ;

Tien, NC ;

Wexler, AS ;

Niemeier, DA ;

Holmen, B .

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, :261-264

[3]

CHUAN RL, 1970, J AEROSOL SCI, V1, P111

[4] Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection [J].

Gabl, R ;

Green, E ;

Schreiter, M ;

Feucht, HD ;

Zeininger, H ;

Primig, R ;

Pitzer, D ;

Eckstein, G ;

Wersing, W ;

Reichl, W ;

Runck, J .

PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, :1184-1188

[5]

GUNDEL LA, 2007, Patent No. 7168292

[6]

KOBRIN PH, 1999, Patent No. 5936150

[7] CHARACTERIZATION OF A QUARTZ CRYSTAL MICROBALANCE WITH SIMULTANEOUS MASS AND LIQUID LOADING [J].

MARTIN, SJ ;

GRANSTAFF, VE ;

FRYE, GC .

ANALYTICAL CHEMISTRY, 1991, 63 (20) :2272-2281

[8] Actual causes of death in the United States, 2000 [J].

Mokdad, AH ;

Marks, JS ;

Stroup, DF ;

Gerberding, JL .

JAMA-JOURNAL OF THE AMERICAN MEDICAL ASSOCIATION, 2004, 291 (10) :1238-1245

[9] PIEZOELECTRIC-ELECTROSTATIC AEROSOL MASS CONCENTRATION MONITOR [J].

OLIN, JG ;

SEM, GJ ;

CHRISTENSON, DL .

AMERICAN INDUSTRIAL HYGIENE ASSOCIATION JOURNAL, 1971, 32 (04) :209-+

[10]

Otis B.P., 2002, P IEEE ESSCIRC 2002, P151

← 1 2 →