Dose limited reliability of quantitative annular dark field scanning transmission electron microscopy for nano-particle atom-counting

被引：41
作者：
De Backer, A. [1 ]
Martinez, G. T. [1 ]
MacArthur, K. E. [2 ]
Jones, L. [2 ]
Beche, A. [1 ]
Nellist, P. D. [2 ]
Van Aert, S. [1 ]
机构：
[1] Univ Antwerp, Electron Microscopy Mat Sci EMAT, B-2020 Antwerp, Belgium
[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
来源：
ULTRAMICROSCOPY | 2015年 / 151卷
基金：
英国工程与自然科学研究理事会; 欧洲研究理事会;
关键词：
High resolution scanning transmission electron microscopy (HR STEM); Nano particle atom counting; Data processing/image processing; Quantitative ADF STEM; Catalyst nano-particles; STRUCTURE PARAMETERS; IMAGES; QUANTIFICATION;
D O I：
10.1016/j.ultramic.2014.11.028
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Quantitative annular dark field scanning transmission electron microscopy (ADF STEM) has become a powerful technique to characterise nano-particles on an atomic scale. Because of their limited size and beam sensitivity, the atomic structure of such particles may become extremely challenging to determine. Therefore keeping the incoming electron dose to a minimum is important. However, this may reduce the reliability of quantitative ADF STEM which will here be demonstrated for nano-particle atom-counting. Based on experimental ADF STEM images of a real industrial catalyst, we discuss the limits for counting the number of atoms in a projected atomic column with single atom sensitivity. We diagnose these limits by combining a thorough statistical method and detailed image simulations. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：56 / 61
页数：6
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