Determination of electrical and mechanical parameters in capacitive MEMS accelerometers using electrical measurements

被引：3

作者：

Kalicinski, Stanislaw ^{[1
]}

Bieniek, Tomasz ^{[1
]}

Janus, Pawel ^{[1
]}

Grabiec, Piotr ^{[1
]}

机构：

[1] Inst Technol Elektronowej, Zaklad Technol Mikrosyst & Nanostruktur Krzemowyc, PL-02668 Warsaw, Poland

来源：

MICROELECTRONICS RELIABILITY | 2011年 / 51卷 / 07期

关键词：

EQUIVALENT-CIRCUIT REPRESENTATION; ELECTROMECHANICAL TRANSDUCERS; RESONATORS;

D O I：

10.1016/j.microrel.2011.03.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a simple technique for characterization of capacitive MEMS accelerometers. The method is based on electrical impedance (admittance) measurements of capacitive MEMS accelerometers treated as electrostatically-driven microelectromechanical resonators. By using this method, it is possible to determine some electrical and mechanical parameters including the shunt capacitance, the mechanical resonance frequency and quality factor. These parameters may serve as measures of structural integrity of the tested structures and their packages during reliability testing, for instance. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：1192 / 1197

页数：6

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