Development of the quadruple mass spectrometer with bessel-box type energy analyzer for the accurate measurement of partial pressures

被引：2

作者：

Takahashi, N ^{[1
]}

Yanagishita, K ^{[1
]}

Hayashi, T ^{[1
]}

Akimichi, H ^{[1
]}

Tuzi, Y ^{[1
]}

机构：

[1] Ulvac Japan Ltd, Chigasaki, Kanagawa 2538543, Japan

来源：

APPLIED SURFACE SCIENCE | 2001年 / 169卷

关键词：

quadruple mass spectrometer; electron stimulated desorption; energy analyzer; ultra high vacuum; extreme high vacuum;

D O I：

10.1016/S0169-4332(00)00785-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Two important factors disturbing the accurate measurement of partial pressures by a quadruple mass spectrometer (QMS) are described in this paper. One is the effect of ions desorbed from the surface of ionizer by electron stimulated desorption (ESD). The conventional QMS cannot separate the ESD ions from the gas phase ions produced in the ionizer. The other one is the background noise due to the irradiation of the secondary electron multiplier (SEM) by the X-rays and the vacuum ultra violet (VUV) photons generated in the ionizer. The new QMS with the bessel-box type energy analyzed is proposed for the reduction of those effects. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：752 / 756

页数：5