Aligned Growth of Millimeter-Size Hexagonal Boron Nitride Single-Crystal Domains on Epitaxial Nickel Thin Film

被引:93
作者
Meng, Junhua [1 ,2 ,3 ]
Zhang, Xingwang [1 ,2 ]
Wang, Ye [1 ,2 ]
Yin, Zhigang [1 ,2 ]
Liu, Heng [1 ]
Xia, Jing [3 ]
Wang, Haolin [1 ]
You, Jingbi [1 ]
Jin, Peng [1 ]
Wang, Denggui [1 ]
Meng, Xiang-Min
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
[3] Chinese Acad Sci, Tech Inst Phys & Chem, Key Lab Photochem Convers & Optoelect Mat, Beijing 100190, Peoples R China
基金
中国国家自然科学基金;
关键词
WAFER-SCALE; H-BN; MONOLAYER; GRAPHENE; NI(111); NUCLEATION; QUALITY; FOILS;
D O I
10.1002/smll.201604179
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Atomically thin hexagonal boron nitride (h-BN) is gaining significant attention for many applications such as a dielectric layer or substrate for graphene-based devices. For these applications, synthesis of high-quality and large-area h-BN layers with few defects is strongly desirable. In this work, the aligned growth of millimeter-size single-crystal h-BN domains on epitaxial Ni (111)/sapphire substrates by ion beam sputtering deposition is demonstrated. Under the optimized growth conditions, single-crystal h-BN domains up to 0.6 mm in edge length are obtained, the largest reported to date. The formation of large-size h-BN domains results mainly from the reduced Ni-grain boundaries and the improved crystallinity of Ni film. Furthermore, the h-BN domains show well-aligned orientation and excellent dielectric properties. In addition, the sapphire substrates can be repeatedly used with almost no limit. This work provides an effective approach for synthesizing large-scale high-quality h-BN layers for electronic applications.
引用
收藏
页数:8
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