Morphogenesis of mesoscopic surface patterns formed in polarized two-photon etching of diamond

被引：10

作者：

Berhane, Amanuel M. ^{[1
,5
]}

Baldwin, Christopher G. ^{[1
]}

Liang, Keri ^{[2
]}

Moshkani, Mojtaba ^{[1
]}

Lustri, Christopher ^{[3
]}

Downes, James E. ^{[1
]}

Stampfl, Catherine ^{[2
,4
]}

Mildren, Richard P. ^{[1
]}

机构：

[1] Macquarie Univ, Dept Phys & Astron, MQ Photon Res Ctr, N Ryde, NSW 2109, Australia

[2] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[3] Macquarie Univ, Dept Math & Stat, N Ryde, NSW 2109, Australia

[4] Univ Sydney, Nano Inst, Sydney, NSW 2006, Australia

[5] Univ New South Wales, Sch Phys, Sydney, NSW 2052, Australia

来源：

CARBON | 2021年 / 173卷

基金：

澳大利亚研究理事会;

关键词：

Diamond; Two-photon absorption; Mesoscopic; Nanostructures; Desorption; Symmetry; Laser machining; Pattern formation; Nanopatterning; Step-edges; Laser etching; INITIO MOLECULAR-DYNAMICS; TOTAL-ENERGY CALCULATIONS; BOND; DISSOCIATION; FABRICATION; ELECTRODES; DESORPTION; MECHANISM; CRYSTALS; HYDROGEN;

D O I：

10.1016/j.carbon.2020.09.029

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Two-photon etching of diamond surfaces is a novel technique for providing controlled removal of atomic layers and nano-patterning the surface. However, the details of the etching mechanism and pattern development are not well understood so that the full capability of the process is unclear. Here, a comprehensive investigation into the dynamics of nanopattern formation on the (100), (110) and (111) facets is reported as a function of polarization, for CVD and HPHT diamond, and for nanosecond and picosecond laser pulse durations. A diverse array of behaviour is observed including sub-wavelength scale structuring with morphologies characteristic of the facet and the selected polarization. As etching proceeds, the anisotropies in the quantum photon-lattice interaction are imprinted on the emergent patterns on nano and mesoscopic scales. The sum of the results leads to rules for predicting pattern type, roughness and etch rate. We also argue that they support a mechanism for carbon ejection based on the photo-ejection of carbonyl groups from carbonyl-supporting surfaces, defects and atomiclevel step edges. The results provide guidance for optically manipulating diamond surfaces and comprise a major step towards a complete model for the process to aid laser direct-write structuring of functional diamond surfaces. (C) 2020 The Author(s). Published by Elsevier Ltd.

引用

页码：271 / 285

页数：15

共 71 条

[1] Origin of femtosecond laser induced periodic nanostructure on diamond [J].

Abdelmalek, A. ;

Sotillo, B. ;

Bedrane, Z. ;

Bharadwaj, V. ;

Pietralunga, S. ;

Ramponi, R. ;

Amara, E. -H. ;

Eaton, S. M. .

AIP ADVANCES, 2017, 7 (10)

[2] Identification of etch-pit crystallographic faces induced on diamond surface by H2/O2 etching plasma treatment [J].

Achard, J. ;

Silva, F. ;

Brinza, O. ;

Bonnin, X. ;

Mille, V. ;

Issaoui, R. ;

Kasu, M. ;

Gicquel, A. .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (09) :1949-1954

[3]

Babinec TM, 2010, NAT NANOTECHNOL, V5, P195, DOI [10.1038/nnano.2010.6, 10.1038/NNANO.2010.6]

[4] Enhanced etch rate of deep-UV laser induced etching of diamond in low pressure conditions [J].

Baldwin, C. G. ;

Downes, J. E. ;

Mildren, R. P. .

APPLIED PHYSICS LETTERS, 2020, 117 (11)

[5] Nanostructuring and oxidation of diamond by two-photon ultraviolet surface excitation: An XPS and NEXAFS study [J].

Baldwin, C. G. ;

Downes, J. E. ;

McMahon, C. J. ;

Bradac, C. ;

Mildren, R. P. .

PHYSICAL REVIEW B, 2014, 89 (19)

[6] Morphologies of diamond films from atomic-scale simulations of chemical vapor deposition [J].

Battaile, CC ;

Srolovitz, DJ ;

Butler, JE .

[7] Diamond processing by focused ion beam-surface damage and recovery [J].

Bayn, I. ;

Bolker, A. ;

Cytermann, C. ;

Meyler, B. ;

Richter, V. ;

Salzman, J. ;

Kalish, R. .

APPLIED PHYSICS LETTERS, 2011, 99 (18)

[8] Deterministic Nanopatterning of Diamond Using Electron Beams [J].

Bishop, James ;

Fronzi, Marco ;

Elbadawi, Christopher ;

Nikam, Vikram ;

Pritchard, Joshua ;

Froch, Johannes E. ;

Ngoc My Hanh Duong ;

Ford, Michael J. ;

Aharonovich, Igor ;

Lobo, Charlene J. ;

Toth, Milos .

ACS NANO, 2018, 12 (03) :2873-2882

[9] Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond [J].

Burek, Michael J. ;

de Leon, Nathalie P. ;

Shields, Brendan J. ;

Hausmann, Birgit J. M. ;

Chu, Yiwen ;

Quan, Qimin ;

Zibrov, Alexander S. ;

Park, Hongkun ;

Lukin, Mikhail D. ;

Loncar, Marko .

NANO LETTERS, 2012, 12 (12) :6084-6089

[10] PATTERN-FORMATION AND SPATIAL CHAOS IN LATTICE DYNAMICAL-SYSTEMS .1. [J].

CHOW, SN ;

MALLETPARET, J .

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-FUNDAMENTAL THEORY AND APPLICATIONS, 1995, 42 (10) :746-751

← 1 2 3 4 5 6 7 8 →