Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

被引：9
|
作者：
Gierl, C. [1 ]
Gruendl, T. [2 ]
Zogal, K. [1 ]
Davani, H. A. [1 ]
Grasse, C. [2 ]
Boehm, G. [2 ]
Kueppers, F. [1 ]
Meissner, P. [1 ]
Amann, M. -C. [2 ]
机构：
[1] Tech Univ Darmstadt, Inst Mikrowellentech & Photon, Darmstadt, Germany
[2] Tech Univ Munich, Walter Schottky Inst, D-8046 Garching, Germany
来源：
ELECTRONICS LETTERS | 2011年 / 47卷 / 22期
关键词：
MODE;
D O I：
10.1049/el.2011.2737
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74 nm in the range of 1.55 mu m and a wavelength tuning speed of similar to 200 kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiO(x) and SiN(y) deposited with low temperature (<100 degrees C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8 mW and >1 mW over the entire tuning range. The side-mode suppression ratio is >40 dB.
引用
收藏
页码：1243 / 1244
页数：2
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