Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

被引：9

作者：

Gierl, C. ^{[1
]}

Gruendl, T. ^{[2
]}

Zogal, K. ^{[1
]}

Davani, H. A. ^{[1
]}

Grasse, C. ^{[2
]}

Boehm, G. ^{[2
]}

Kueppers, F. ^{[1
]}

Meissner, P. ^{[1
]}

Amann, M. -C. ^{[2
]}

机构：

[1] Tech Univ Darmstadt, Inst Mikrowellentech & Photon, Darmstadt, Germany

[2] Tech Univ Munich, Walter Schottky Inst, D-8046 Garching, Germany

来源：

ELECTRONICS LETTERS | 2011年 / 47卷 / 22期

关键词：

MODE;

D O I：

10.1049/el.2011.2737

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74 nm in the range of 1.55 mu m and a wavelength tuning speed of similar to 200 kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiO(x) and SiN(y) deposited with low temperature (<100 degrees C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8 mW and >1 mW over the entire tuning range. The side-mode suppression ratio is >40 dB.

引用

页码：1243 / 1244

页数：2

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