Surface micromachined MEMS-tunable VCSELs with wide and fast wavelength tuning

被引：9

作者：

Gierl, C. ^{[1
]}

Gruendl, T. ^{[2
]}

Zogal, K. ^{[1
]}

Davani, H. A. ^{[1
]}

Grasse, C. ^{[2
]}

Boehm, G. ^{[2
]}

Kueppers, F. ^{[1
]}

Meissner, P. ^{[1
]}

Amann, M. -C. ^{[2
]}

机构：

[1] Tech Univ Darmstadt, Inst Mikrowellentech & Photon, Darmstadt, Germany

[2] Tech Univ Munich, Walter Schottky Inst, D-8046 Garching, Germany

来源：

ELECTRONICS LETTERS | 2011年 / 47卷 / 22期

关键词：

MODE;

D O I：

10.1049/el.2011.2737

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For the first time a vertical-cavity surface-emitting laser (VCSEL) with singlemode wavelength tuning over 74 nm in the range of 1.55 mu m and a wavelength tuning speed of similar to 200 kHz is demonstrated. The wavelength tuning is achieved with the electro static actuated of a mirror membrane, fabricated with surface micromachining. The mirror membrane consists of the dielectric materials SiO(x) and SiN(y) deposited with low temperature (<100 degrees C) plasma enhanced chemical vapour deposition. The maximum fibre-coupled optical output power of the VCSEL is 1.8 mW and >1 mW over the entire tuning range. The side-mode suppression ratio is >40 dB.

引用

页码：1243 / 1244

页数：2

共 5 条

[1] Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning
Gierl, C.
Gruendl, T.
Debernardi, P.
Zogal, K.
Grasse, C.
Davani, H. A.
Boehm, G.
Jatta, S.
Kueppers, F.
Meissner, P.
Amann, M. -C.
[J]. OPTICS EXPRESS, 2011, 19 (18): : 17336 - 17343
[2] Tuneable VCSEL aiming for the application in interconnects and short haul systems
Gierl, Christian
Zogal, Karolina
Jatta, Sandro
Davani, Hooman A.
Kueppers, Franko
Meissner, Peter
Gruendl, Tobias
Grasse, Christian
Amann, Markus-Christian
Daly, Aidan
Corbett, Brian
Koegel, Benjamin
Haglund, Asa
Gustavsson, Johan
Westbergh, Petter
Larsson, Anders
Debernardi, Pierluigi
Ortsiefer, Markus
[J]. OPTICAL METRO NETWORKS AND SHORT-HAUL SYSTEMS III, 2011, 7959
[3] Simultaneous spectroscopy of NH3 and CO using a > 50 nm continuously tunable MEMS-VCSEL
Koegel, Benjamin
Halbritter, Hubert
Jatta, Sandro
Maute, Markus
Boehm, Gerhard
Amann, Markus-Christian
Lackner, Maximilian
Schwarzott, Michael
Winter, Franz
Meissner, Peter
[J]. IEEE SENSORS JOURNAL, 2007, 7 (11-12) : 1483 - 1489
[4] RAUSCH J, 2009, IEEE SENSORS, P1329
[5] Half-symmetric cavity tunable microelectromechanical VCSEL with single spatial mode
Tayebati, P
Wang, P
Vakhshoori, D
Lu, CC
Azimi, M
Sacks, RN
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (12) : 1679 - 1681

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