Transparent MgF2-films by sol-gel coating:: Synthesis and optical properties

被引：54

作者：

Krueger, Hannes ^{[1
,2
]}

Kemnitz, Erhard ^{[1
]}

Hertwig, Andreas ^{[2
]}

Beck, Uwe ^{[2
]}

机构：

[1] Humboldt Univ, Inst Chem, D-12489 Berlin, Germany

[2] BAM Fed Inst Mat Res & Testing, Div VI Surgace Technol 4, D-12205 Berlin, Germany

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 12期

关键词：

sol-gel; nano-MgF2; spin coating; optical properties; nanoparticles;

D O I：

10.1016/j.tsf.2007.10.126

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Dielectric, anti-reflective or high reflective systems consist of low and high refractive index layers. Common systems are oxides. The preparation of low refractive index MgF2-films of optical quality by means of an anhydrous low temperature sol-gel synthesis is presented. The MgF2-sol is prepared by spin-coating on silicon and glass substrates. Various film thicknesses between 20 nm and 435 nm have been deposited. It has been shown that the thickness increase is proportional to the number of coating steps. The deposited MgF2-filMS consist of 10 nm to 20 nm large nanoparticles and have smooth surfaces with an average roughness (R-a) of (1.7 +/- 0.3) m. The optical constants n and k of the films are in agreement with the literature data of bulk-MgF2. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：4175 / 4177

页数：3

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