Deposition and characterization of YSZ thin films by aerosol-assisted CVD

被引：104

作者：

Wang, HB ^{[1
]}

Xia, CR ^{[1
]}

Meng, GY ^{[1
]}

Peng, DK ^{[1
]}

机构：

[1] Univ Sci & Technol China, Dept Mat Sci & Engn, Anhua 230026, Peoples R China

来源：

MATERIALS LETTERS | 2000年 / 44卷 / 01期

关键词：

AACVD; thin film; YSZ;

D O I：

10.1016/S0167-577X(99)00291-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of ionic-conducting electrolyte yttria-stabilized zirconia (YSZ) have been prepared on Si(lll) substrates by aerosol-assisted chemical vapor deposition (AACVD), using the beta-diketonate precursors zirconium acetylacetonate, Zr(acac)(4), and yttrium acetylacetonate, Y(acac)(3), in the substrate temperature range of 550-700 degrees C. YSZ thin films were homogeneous and transparent with a cubic fluorite structure. The compositions of the thin films are very close to those of mixed solution precursors at deposited temperatures. The electrical property investigation demonstrated that the ionic conductivity in the surface layer of the as-deposited film is much higher, and its activation energy is slightly less than that of the YSZ single crystal material. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：23 / 28

页数：6

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