Structural perfection of Czochralski grown silicon crystals annealed above 1500 K under hydrostatic pressure

The structural perfection of Czochralski grown silicon crystals annealed at 1580-1620 It under hydrostatic pressure up to 10(9) Pa was investigated by X-ray diffractometry and topography supplemented by the method of absorption of infrared rays. Such treatment suppresses dissolution of oxygen-related defects. From the static Debye-Waller factor dependence on the reflection order it was concluded that large clusters or dislocation loops are the dominant type of defects for most of the samples.