共 11 条
[2]
BREAKDOWN OF AIR AT MICROWAVE FREQUENCIES
[J].
JOURNAL OF APPLIED PHYSICS,
1956, 27 (10)
:1162-1170
[4]
Particle-in-cell Monte-Carlo simulation of capacitive RF discharges: Comparison with experimental data
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2005, 44 (4A)
:1957-1958
[7]
RAIZER YP, 1997, GAS DISCHARGE PHYS, P39
[10]
VAUGHAN R, 1993, IEEE T ELECTRON DEV, V40, P830, DOI 10.1109/16.202798