Thermally actuated untethered impact-driven locomotive microdevices

被引：72

作者：

Sul, O. J. ^{[1
]}

Falvo, M. R.

Taylor, R. M., II

Washburn, S.

Superfine, R.

机构：

[1] Univ N Carolina, Dept Phys & Astron, Chapel Hill, NC 27599 USA

[2] Univ N Carolina, Curriculum Appl & Mat Sci, Chapel Hill, NC 27599 USA

[3] Univ N Carolina, Dept Comp Sci, Chapel Hill, NC 27599 USA

[4] Univ N Carolina, Dept Biomed Engn, Chapel Hill, NC 27599 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 20期

关键词：

D O I：

10.1063/1.2388135

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors have developed steerable locomotive devices as small as 30 mu m using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device. (c) 2006 American Institute of Physics.

引用

页数：3

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