Analysis of incubation time preceding the Ga-assisted nucleation and growth of GaAs nanowires on Si(111)

被引:3
作者
Bastiman, Faebian [1 ]
Kuepers, Hanno [1 ]
Somaschini, Claudio [1 ,3 ]
Dubrovskii, Vladimir G. [2 ]
Geelhaar, Lutz [1 ]
机构
[1] Leibniz Inst Forsch Verbund Berlin eV, Paul Drude Inst Festkorperelekt, Hausvogteipl 5-7, D-10117 Berlin, Germany
[2] ITMO Univ, Kronverkskiy Prospekt 49, St Petersburg 197101, Russia
[3] Politecn Milan, PoliFab, Via Giuseppe Colombo 81, I-20133 Milan, Italy
基金
俄罗斯基础研究基金会;
关键词
SELF-CATALYZED GROWTH; SEMICONDUCTOR NANOWIRES; PHASE;
D O I
10.1103/PhysRevMaterials.3.073401
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The incubation time preceding nucleation and growth of surface nanostructures is interesting from a fundamental viewpoint but also of practical relevance as it determines statistical properties of nanostructure ensembles such as size homogeneity. Using in situ reflection high-energy electron diffraction, we accurately deduce the incubation times for Ga-assisted GaAs nanowires grown on unpatterned Si(111) substrates by molecular beam epitaxy under different conditions. We develop a nucleation model that explains and fits the data very well. We find that, for a given temperature and Ga flux, the incubation time always increases with decreasing As flux and becomes infinite at a certain minimum flux, which is larger for higher temperature. For given As and Ga fluxes, the incubation time always increases with temperature and rapidly tends to infinity above 640 degrees C under typical conditions. The strong temperature dependence of the incubation time is reflected in a similar variation of the nanowire number density with temperature. Our analysis provides understanding and guidance for choosing appropriate growth conditions that avoid unnecessary material consumption, long nucleation delays, and highly inhomogeneous ensembles of nanowires. On a more general ground, the existence of a minimum flux and maximum temperature for growing surface nanostructures should be a general phenomenon pertaining to a wide range of material-substrate combinations.
引用
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页数:8
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