Spherically Encapsulated Variable Liquid Lens on Coplanar Electrodes

被引：14

作者：

An, Jae Yong ^{[1
]}

Hur, Ji Hwan ^{[1
]}

Kim, Sohee ^{[1
,2
]}

Lee, Jong Hyun ^{[1
,2
]}

机构：

[1] Gwangju Inst Sci & Technol, Sch Mechatron, Kwangju 500712, South Korea

[2] Gwangju Inst Sci & Technol, Grad Program Med Syst Engn, Kwangju 500712, South Korea

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2011年 / 23卷 / 22期

关键词：

Electrooptic devices; lenses; micro fabrication; optical device fabrication; MICROLENS;

D O I：

10.1109/LPT.2011.2167606

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We herein demonstrated an electrowetting liquid lens using a spherical polymeric encapsulation on coplanar electrodes. In order to vary the focal length, the conductive inner lens was actuated by applying a voltage to the pinwheel-shaped coplanar electrodes. Silicone oil with a low vapor pressure was used as a nonconductive outer liquid lens, which was spherically encapsulated by chemical vapor deposition of thin-film polymer. The use of polymeric (parylene) encapsulation with coplanar indium-tin-oxide (ITO) electrodes provides a unique advantage in achieving an improved transparency, a wafer-level packaging of the liquid lens and the convenient accessibility of the electrical signal.

引用

页码：1703 / 1705

页数：3