Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas

被引：123

作者：

Liu, Yong-Xin ^{[1
]}

Zhang, Quan-Zhi ^{[1
]}

Jiang, Wei ^{[2
]}

Hou, Lu-Jing ^{[3
]}

Jiang, Xiang-Zhan ^{[1
]}

Lu, Wen-Qi ^{[1
]}

Wang, You-Nian ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

[2] Huazhong Univ Sci & Technol, Sch Phys, Wuhan 430074, Peoples R China

[3] Max Planck Inst Extraterr Phys, D-85748 Garching, Germany

来源：

PHYSICAL REVIEW LETTERS | 2011年 / 107卷 / 05期

基金：

中国国家自然科学基金;

关键词：

ELECTRON-ENERGY-DISTRIBUTION; RF DISCHARGE;

D O I：

10.1103/PhysRevLett.107.055002

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.

引用

页数：4

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