Growth and mechanical properties of diamond films on cemented carbide with buffer layers

被引:19
作者
Liu, M. N. [1 ]
Bian, Y. B. [1 ]
Zheng, S. J. [1 ]
Zhu, T. [1 ]
Chen, Y. G. [1 ]
Chen, Y. L. [2 ]
Wang, J. S. [2 ]
机构
[1] Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China
[2] Shanghai Well Sun Precis Tool Co Ltd, Shanghai, Peoples R China
关键词
Diamond; Coatings; Hot filament chemical vapor deposition; Buffer layer; Vickers hardness; CHEMICAL-VAPOR-DEPOSITION; SUBSTRATE PRETREATMENTS; RAMAN-SPECTROSCOPY; COATINGS; ADHESION; CRN;
D O I
10.1016/j.tsf.2015.01.021
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The main hindrance to applications of diamond coatings on cemented carbide cutting tools is poor adhesion between diamond films and the substrates, caused mainly by Co acting as a catalyst for the formation of graphite during the growth of the diamond films. The buffer-layer technique is commonly used to reduce the elemental diffusion or residual stress in the interface between the film and substrate. In this paper, four kinks of buffer layers, namely TiN, CrN, TiC, and SiN, were applied to (111)-textured diamond films grown on mirror-polished cemented carbide substrates using the hot-filament chemical vapor deposition method. The adhesion strengths of different samples are measured by Vickers hardness tests and compared to show the different effects of the buffer layers. The sample with an 800-nm-thick CrN layer and processed by 10-min chemical etching has the best adhesion among the four buffer layers. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:165 / 169
页数:5
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