Built-in Optical Angular Position Sensing Mechanism for High-Resolution Vibratory Grating Scanner

被引：0

作者：

Cheo, Kelvin K. L. ^{[1
]}

Zhou, Guangya ^{[1
]}

Du, Yu ^{[1
]}

Chau, Fook Siong ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Mech Engn, Micro Nano Syst Initiat, Singapore 117576, Singapore

来源：

OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年

关键词：

micromirrors; grating scanners; angular position sensing; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing.

引用

页码：17 / 18

页数：2

共 6 条

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