Re-deposition of ITER-grade Be on plasma gun facility QSPA-Be: Characterization & plasma cleaning

被引：3

作者：

Dmitriev, A. M. ^{[1
,2
,6
]}

Razdobarin, A. G. ^{[1
]}

Snigirev, L. A. ^{[1
]}

Elets, D., I ^{[1
,6
]}

Bukreev, I. M. ^{[1
]}

Babinov, N. A. ^{[1
,2
]}

Varshavchik, L. A. ^{[1
]}

Mukhin, E. E. ^{[1
]}

Samsonov, D. S. ^{[1
]}

Tolstyakov, S. Yu ^{[1
]}

Chernakov, An P. ^{[1
,2
]}

Kovalenko, D., V ^{[3
]}

Pogkovyrov, V. L. ^{[3
]}

Yaroshevskaya, A. D. ^{[3
]}

Barsuk, V. A. ^{[3
]}

Kupriyanov, I. B. ^{[4
]}

Bukhovets, V. L. ^{[5
]}

Gorodetsky, A. E. ^{[5
]}

Markin, A., V ^{[5
]}

Zalavutdinov, R. Kh ^{[5
]}

Arkhipushkin, I. A. ^{[5
]}

Krat, S. A. ^{[6
]}

Polskij, V., I ^{[6
]}

Gurbich, A. F. ^{[7
]}

机构：

[1] Ioffe Inst, St Petersburg 194021, Russia

[2] Spectral Tech JSC, St Petersburg 194021, Russia

[3] SRC RF TRINITI, Moscow 108840, Russia

[4] Bochvar Inst, Moscow 123098, Russia

[5] Frumkin Inst Phys Chem & Electrochem, Moscow 119071, Russia

[6] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia

[7] Inst Phys & Power Engn, Obninsk, Russia

来源：

NUCLEAR MATERIALS AND ENERGY | 2022年 / 30卷

关键词：

First mirrors; Protective windows; Beryllium; Surface analysis; Plasma cleaning; RF discharge; BERYLLIUM-OXIDE; JET;

D O I：

10.1016/j.nme.2021.101111

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

Studies of contaminants obtained by spraying ITER-grade Be on a quasi-stationary plasma gun facility QSPA-Be are presented. Contaminating films, consisting mainly of Be and O in approximately equal proportions, were deposited on substrates of quartz, sapphire, single crystalline silicon (SC-Si) and NaCl crystal. Characterization of the deposits was performed using SEM, XPS, EBS, AFM, SE, TEM&SAED and micro-interferometry showing polycrystalline BeO films similar as found in JET-ILW. Films on SC-Si and NaCl were used to characterize their composition and morphology. The cleaning rates in the 81.36 MHz RF discharges in He or D-2 at 2 Pa were measured on the SC-Si target. The measured etching rate of the deposited films was several times higher than the rate calculated from the theoretical value of beryllium oxide sputtering yield. Test cleaning of these contaminants was carried out in a capacitively coupled RF discharge (CCRF) from the surface of sapphire and quartz plates, which were considered as a mock-ups of the protective window of the first mirror unit (FMU) designed for ITER divertor Thomson scattering diagnostic system (DTS).

引用

页数：9

共 33 条

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[33] CHARACTERIZATION OF A 1 KA VACUUM-ARC PLASMA GUN FOR USE AS A METAL VAPOR-DEPOSITION SOURCE
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