Formation of a copper oxide layer as a key step in the metallic copper deposition mechanism

被引:14
作者
Gimenez-Romero, David [1 ]
Garcia-Jareno, Jose Juan [1 ]
Agrisuelas, Jeronimo [1 ]
Gabrielli, Claude [2 ]
Perrot, Hubert [2 ]
Vicente, Francisco [1 ]
机构
[1] Univ Valencia, Dept Quim Fis, E-46100 Valencia, Spain
[2] Univ Paris 06, Lab Interfaces & Syst Electrochim, CNRS, UPR 15, F-75252 Paris, France
关键词
D O I
10.1021/jp7107076
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper demonstrates the formation of a Cu(OH)(1.5)Cl-0.5 layer as a key step in the metallic copper electrodeposition mechanism in sulfate solutions. This layer is located surprisingly into the metal/solution interface and not on the reaction substrate. The difficult to study metal/solution interface makes indispensable the use of unconventional measurement techniques. In this way, a careful in situ study by means of acoustic impedance techniques associated with gravimetric techniques allowed the growth of this layer during the metallic copper electrodeposition process to be monitored, probably for the first time.
引用
收藏
页码:4275 / 4280
页数:6
相关论文
共 33 条
[1]   MECHANISM OF ELECTRODEPOSITION AND DISSOLUTION PROCESSES OF COPPER IN AQUEOUS SOLUTIONS [J].
BOCKRIS, JO ;
ENYO, M .
TRANSACTIONS OF THE FARADAY SOCIETY, 1962, 58 (474) :1187-&
[2]   Influence of additives on Cu electrodeposition mechanisms in acid solution: direct current study supported by non-electrochemical measurements [J].
Bonou, L ;
Eyraud, M ;
Denoyel, R ;
Massiani, Y .
ELECTROCHIMICA ACTA, 2002, 47 (26) :4139-4148
[3]   Full copper wiring in a sub-0.25 μm CMOS ULSI technology [J].
Edelstein, D ;
Heidenreich, J ;
Goldblatt, R ;
Cote, W ;
Uzoh, C ;
Lustig, N ;
Roper, P ;
McDevitt, T ;
Motsiff, W ;
Simon, A ;
Dukovic, J ;
Wachnik, R ;
Rathore, H ;
Schulz, R ;
Su, L ;
Luce, S ;
Slattery, J .
INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST, 1997, :773-776
[4]   A model for copper deposition in the damascene process [J].
Gabrielli, C ;
Moçotéguy, P ;
Perrot, H ;
Nieto-Sanz, D ;
Zdunek, A .
ELECTROCHIMICA ACTA, 2006, 51 (8-9) :1462-1472
[5]   Mechanism of copper deposition in a sulphate bath containing chlorides [J].
Gabrielli, C ;
Moçotéguy, P ;
Perrot, H ;
Wiart, R .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 2004, 572 (02) :367-375
[6]   Graphical analysis of electrochemical impedance spectroscopy of two consecutive irreversible electron transfers.: 1.: Theoretical study of the anodic dissolution of metals [J].
García-Jareño, JJ ;
Giménez-Romero, D ;
Keddam, M ;
Vicente, F .
JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (10) :4584-4592
[7]   Validation of the mass response of a quartz crystal microbalance coated with Prussian Blue film for ac electrogravimetry [J].
García-Jareño, JJ ;
Gabrielli, C ;
Perrot, H .
ELECTROCHEMISTRY COMMUNICATIONS, 2000, 2 (03) :195-200
[8]   Studies of electroplating using an EQCM - I. Copper and silver on gold [J].
Gileadi, E ;
Tsionsky, V .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (02) :567-574
[9]   Kinetics of zinc anodic dissolution from the EIS characteristic points [J].
Giménez-Romero, D ;
García-Jareño, JJ ;
Vicente, F .
ELECTROCHEMISTRY COMMUNICATIONS, 2003, 5 (08) :722-727
[10]   Electrochemical quartz crystal microbalance study of copper electrochemical reaction in acid medium containing chlorides [J].
Giménez-Romero, D ;
Gabrielli, C ;
García-Jareño, JJ ;
Perrot, H ;
Vicente, F .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (05) :J32-J39