Low temperature TiN coating of Zinalco by sputtering

被引：0
|
作者：
Flores, M
Heiras, JL
Muhl, S
Vite, M
机构：
来源：
SURFACES, VACUUM, AND THEIR APPLICATIONS | 1996年 / 378期
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暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
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页码：342 / 347
页数：6
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