A new "fluoride" synthesis route for successive ionic layer deposition of the ZnxZr(OH)yFz.nH2O nanolayers

被引：21

作者：

Tolstoy, V. P. ^{[1
]}

Altangerel, B. ^{[1
]}

机构：

[1] St Petersburg State Univ, Inst Chem, St Petersburg 198504, Russia

来源：

MATERIALS LETTERS | 2007年 / 61卷 / 01期

关键词：

thin films; deposition; nanomaterials; layer-by-layer; zirconium hydroxide;

D O I：

10.1016/j.matlet.2006.04.019

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It was for the fist time shown that hydroxo-fluoride nanolayers with the general formula MxZr(OH)(y)F-z center dot nH(2)O can be synthesized by the successive ionic layer deposition method using soluble complexes of metal fluorides as reagents. By an example of the ZnxZr(OH)(y)F-z center dot nH(2)O nanolayers on silicon surfaces, the effect of pH, the reagent concentration, and the number of the deposition cycles was examined. The composition and structure of these layers were determined by X-ray photoelectron and FTIR transmission spectroscopy, X-ray diffraction, scanning electron microscopy (SEM), while the growth kinetics was evaluated by ellipsometry. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：123 / 125

页数：3

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