Development of roll-to-roll hot embossing system with induction heater for micro fabrication

In this paper, a hot embossing heating roll with induction heater inside the roll is proposed. The induction heating coil is installed inside a roll that is used as a heating roll of a roll-to-roll (R2R) hot embossing apparatus. Using an inside installed heating coil gives the roll-to-roll hot embossing system a more even temperature distribution on the surface of the heating roll compared to that of previous systems, which used an electric wire for heating. This internal induction heating roll can keep the working environment much cleaner because there is no oil leakage compared to the oiled heating roll. This paper describes the principles and provides an analysis of this proposed system; some evaluation has also been performed for the system. A real R2R hot embossing heating roll system was fabricated and some experiments on micro-pattering have been performed. After that, evaluation has been performed on the results. (C) 2012 American Institute of Physics. [doi:10.1063/1.3675574]