Facile Preparation of High-Performance Elastically Stretchable Interconnects

被引：38

作者：

Polywka, Andreas ^{[1
]}

Jakob, Timo ^{[1
]}

Stegers, Luca ^{[1
]}

Riedl, Thomas ^{[2
]}

Goerrn, Patrick ^{[1
]}

机构：

[1] Berg Univ Wuppertal, Chair Large Area Optoelect, D-42119 Wuppertal, Germany

[2] Berg Univ Wuppertal, Inst Elect Devices, D-42119 Wuppertal, Germany

来源：

ADVANCED MATERIALS | 2015年 / 27卷 / 25期

关键词：

electroless deposition; lithography; poly(dimethylsiloxane) (PDMS); silver; stretchable; METAL CONDUCTORS; GOLD CONDUCTORS; ELECTRONICS; DEPOSITION; SURFACES; SILICON; POLYMER; RUBBER; FILMS;

D O I：

10.1002/adma.201501461

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Sites on poly(dimethylsiloxane) are selected by ultraviolet exposure. In a subsequent electroless deposition, solid silver films are created on the selected sites only. In this way, facile vacuum-free deposition of electrodes from the liquid phase and their photoresist-and solvent-free patterning are realized. The technique enables reliable rigid-to-soft interconnects that are reversibly stretchable under arbitrary and changing stretching directions.

引用

页码：3755 / 3759

页数：5

共 25 条

[1] Polyelectrolyte brushes as efficient ultrathin platforms for site-selective copper electroless deposition [J].

Azzaroni, Omar ;

Zheng, Zijian ;

Yang, Zhongqiang ;

Huck, Wilhelm T. S. .

LANGMUIR, 2006, 22 (16) :6730-6733

[2] The controlled formation of ordered, sinusoidal structures by plasma oxidation of an elastomeric polymer [J].

Bowden, N ;

Huck, WTS ;

Paul, KE ;

Whitesides, GM .

APPLIED PHYSICS LETTERS, 1999, 75 (17) :2557-2559

[3] Biaxially stretchable "Wavy" silicon nanomembranes [J].

Choi, Won Mook ;

Song, Jizhou ;

Khang, Dahl-Young ;

Jiang, Hanqing ;

Huang, Yonggang Y. ;

Rogers, John A. .

NANO LETTERS, 2007, 7 (06) :1655-1663

[4] Surface modification of Sylgard-184 poly(dimethyl siloxane) networks by ultraviolet and ultraviolet/ozone treatment [J].

Efimenko, K ;

Wallace, WE ;

Genzer, J .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2002, 254 (02) :306-315

[5] Isotropically stretchable gold conductors on elastomeric substrates [J].

Goerrn, Patrick ;

Cao, Wenzhe ;

Wagner, Sigurd .

SOFT MATTER, 2011, 7 (16) :7177-7180

[6] Topographies of plasma-hardened surfaces of poly(dimethylsiloxane) [J].

Goerrn, Patrick ;

Wagner, Sigurd .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (09)

[7] Controlling the Morphology of Gold Films on Poly(dimethylsiloxane) [J].

Graudejus, Oliver ;

Goerrn, Patrick ;

Wagner, Sigurd .

ACS APPLIED MATERIALS & INTERFACES, 2010, 2 (07) :1927-1933

[8] Matrix-Assisted Catalytic Printing for the Fabrication of Multiscale, Flexible, Foldable, and Stretchable Metal Conductors [J].

Guo, Ruisheng ;

Yu, You ;

Xie, Zhuang ;

Liu, Xuqing ;

Zhou, Xuechang ;

Gao, Yufan ;

Liu, Zhilu ;

Zhou, Feng ;

Yang, Yong ;

Zheng, Zijian .

ADVANCED MATERIALS, 2013, 25 (24) :3343-3350

[9] Spherical deformation of compliant substrates with semiconductor device islands [J].

Hsu, PI ;

Huang, M ;

Xi, Z ;

Wagner, S ;

Suo, Z ;

Sturm, JC .

JOURNAL OF APPLIED PHYSICS, 2004, 95 (02) :705-712

[10] The effects of encapsulation on deformation behavior and failure mechanisms of stretchable interconnects [J].

Hsu, Yung-Yu ;

Gonzalez, Mario ;

Bossuyt, Frederick ;

Axisa, Fabrice ;

Vanfleteren, Jan ;

De Wolf, Ingrid .

THIN SOLID FILMS, 2011, 519 (07) :2225-2234

← 1 2 3 →