Extending integrated-circuit yield-models to estimate early-life reliability

被引:27
作者
Barnett, TS [1 ]
Singh, AD
Nelson, VP
机构
[1] IBM Microelect, Essex Jct, VT 05452 USA
[2] Auburn Univ, Dept Elect & Comp Engn, Auburn, AL 36849 USA
关键词
burn-in; clustering; defect; infant mortality; negative binomial distribution; reliability; yield;
D O I
10.1109/TR.2003.816418
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
The integrated yield-reliability model for integrated circuits allows one to estimate the yield, following both wafer probe and burn-in testing. The model is based on the long observed clustering of defects and the experimentally verified relation between defects causing wafer probe failures, and defects causing infant mortality failures. The 2-parameter negative binomial distribution is used to describe the distribution of defects over a semiconductor wafer. The clustering parameter alpha, while known to play a key role in accurately determining wafer probe yields, is shown, for the first time, to play a similar role in determining burn-in fall-out. Numerical results indicate that the number of infant mortality failures predicted by the clustering model can differ appreciably from calculations that ignore clustering. This,is particularly apparent when wafer probe yields are low, and clustering is high.
引用
收藏
页码:296 / 300
页数:5
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