Finite element analysis simulation and experimental verification of the stressed lap's deformation accuracy

被引：7

作者：

Luo, Xiao ^{[1
,2
]}

Zheng, Ligong ^{[1
]}

Zhang, Xuejun ^{[1
]}

机构：

[1] Chinese Acad Sci, Key Lab Opt Syst Adv Mfg Technol, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China

[2] Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

来源：

APPLIED OPTICS | 2011年 / 50卷 / 05期

关键词：

MIRROR; FABRICATION;

D O I：

10.1364/AO.50.000782

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The deformation accuracy of the stressed lap is crucial to the fit between the lap and mirror in the production of large aspherics with stressed lap technology. As a preliminary work, we analyze a prototype model with the assistance of finite element analysis tools and build it out based on the analysis results in order to verify the accuracy of the deformation. Test results show that both the high-order residual error and repeatability of deformation of the lap are within 1 mu m rms in an 80% diameter of the lap for common deformations, faithfully meeting the accuracy requirement in the polishing process. (C) 2011 Optical Society of America

引用

页码：782 / 787

页数：6

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