Spatial distribution maps for atom probe tomography

被引：167

作者：

Geiser, Brian P. ^{[1
]}

Kelly, Thomas F. ^{[1
]}

Larson, David J. ^{[1
]}

Schneir, Jason ^{[1
]}

Roberts, Jay P. ^{[1
]}

机构：

[1] Imago Sci Instruments Corp, Madison, WI 53711 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2007年 / 13卷 / 06期

关键词：

atom probe tomography (APT); spatial distribution maps (SDM); Fourier analysis; spatial resolution; trajectory aberration; crystal structure;

D O I：

10.1017/S1431927607070948

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A real-space technique for finding structural information in atom probe tomographs, spatial distribution maps (SDM), is described. The mechanics of the technique are explained, and it is then applied to some test cases. Many applications of SDM in atom probe tomography are illustrated with examples including finding crystal lattices, correcting lattice strains in reconstructed images, quantifying trajectory aberrations, quantifying spatial resolution, quantifying chemical ordering, dark-field imaging, determining orientation relationships, extracting radial distribution functions, and measuring ion detection efficiency.

引用

页码：437 / 447

页数：11

共 17 条

[1] A GENERAL PROTOCOL FOR THE RECONSTRUCTION OF 3D ATOM-PROBE DATA [J].