A Millimeter-Wave Micromachined Air-Filled Slot Antenna Fed by Patch

被引：18
作者：
Liu, Peiqin [1 ]
Chang, Le [1 ]
Li, Yue [1 ]
Zhang, Zhijun [1 ]
Wang, Shaodong [2 ]
Feng, Zhenghe [1 ]
机构：
[1] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol, State Key Lab Microwave & Commun, Beijing 100084, Peoples R China
[2] Hebei Semicond Res Inst, Shijiazhuang 050000, Hebei, Peoples R China
来源：
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY | 2017年 / 7卷 / 10期
基金：
中国国家自然科学基金;
关键词：
Air-filled slot antenna; bulk silicon microelectromechanical systems (MEMS) micromachining technology; millimeter-wave; patch feeding structure; BAND; GUIDE; LTCC; ARRAY; TECHNOLOGY;
D O I：
10.1109/TCPMT.2017.2711361
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, a millimeter-wave air-filled slot antenna is presented based on bulk silicon microelectromechanical systems micromachining technology. The antenna is suitable for system-in-package application by utilizing this silicon micromachining technique. To achieve high radiation efficiency in millimeter-wave band, three gold-plated silicon layers are bonded together to realize an air-filled slot antenna. The air-filled structure has the advantages of reducing transmission loss and enhancing the radiation gain. To mitigate the discontinuity between silicon and air, the proposed antenna employs a patch to feed the air-filled structure that also broadens the impedance bandwidth. Owing to the micromachining technique and the air-filled structure, the antenna can be easily integrated with integrated circuit without suffering from dielectric loss. The measured impedance bandwidth of the proposed antenna is 56.3-63.4 GHz, and the measured peak gain is 7.8 dBi at 60 GHz.
引用
收藏
页码：1683 / 1690
页数：8
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