Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses

被引:583
作者
Borowiec, A [1 ]
Haugen, HK
机构
[1] McMaster Univ, Brockhouse Inst Mat Res, Hamilton, ON L8S 4M1, Canada
[2] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4M1, Canada
[3] McMaster Univ, CEMD, Hamilton, ON L8S 4M1, Canada
关键词
D O I
10.1063/1.1586457
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-spatial-frequency periodic structures on the surfaces of InP, GaP, and GaAs have been observed after multiple-pulse femtosecond laser irradiation at wavelengths in the transparency regions of the respective solids. The periods of the structures are substantially shorter than the wavelengths of the incident laser fields in the bulk materials. In contrast, high-frequency structures were not observed for laser photon energies above the band gaps of the target materials. (C) 2003 American Institute of Physics.
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收藏
页码:4462 / 4464
页数:3
相关论文
共 18 条
  • [1] Laser processing of sapphire with picosecond and sub-picosecond pulses
    Ashkenasi, D
    Rosenfeld, A
    Varel, H
    Wahmer, M
    Campbell, EEB
    [J]. APPLIED SURFACE SCIENCE, 1997, 120 (1-2) : 65 - 80
  • [2] Bauerle D., 2000, ADV TEXTS PHYS
  • [3] SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS
    BIRNBAUM, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (11) : 3688 - &
  • [4] SUBMICRON PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH POLARIZED EXCIMER LASER ULTRAVIOLET-RADIATION
    BOLLE, M
    LAZARE, S
    [J]. APPLIED SURFACE SCIENCE, 1993, 65-6 (1-4) : 349 - 354
  • [5] Femtosecond laser ablation of silicon-modification thresholds and morphology
    Bonse, J
    Baudach, S
    Krüger, J
    Kautek, W
    Lenzner, M
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (01): : 19 - 25
  • [6] Diels J., 1996, ULTRASHORT LASER PUL
  • [7] Femtosecond ablation of ultrahard materials
    Dumitru, G
    Romano, V
    Weber, HP
    Sentis, M
    Marine, W
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (06): : 729 - 739
  • [8] GROWTH OF SPONTANEOUS PERIODIC SURFACE-STRUCTURES ON SOLIDS DURING LASER ILLUMINATION
    GUOSHENG, Z
    FAUCHET, PM
    SIEGMAN, AE
    [J]. PHYSICAL REVIEW B, 1982, 26 (10): : 5366 - 5381
  • [9] GaAs under intense ultrafast excitation: Response of the dielectric function
    Huang, L
    Callan, JP
    Glezer, EN
    Mazur, E
    [J]. PHYSICAL REVIEW LETTERS, 1998, 80 (01) : 185 - 188
  • [10] LASER-INDUCED DAMAGE ON SINGLE-CRYSTAL METAL-SURFACES
    JEE, Y
    BECKER, MF
    WALSER, RM
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1988, 5 (03) : 648 - 659