Thin film diamond membranes bonded on-demand with SOI ring resonators

被引：15
作者：
Hill, Paul [1 ,2 ]
Gu, Erdan [1 ]
Dawson, Martin D. [1 ]
Strain, Michael J. [1 ]
机构：
[1] Univ Strathclyde, Technol & Innovat Ctr, Inst Photon, 99 George St, Glasgow G1 1RD, Scotland
[2] Univ Warwick, Ctr Doctoral Training, Diamond Sci & Technol, Gibbet Hill Rd, Coventry CV4 7AL, W Midlands, England
来源：
DIAMOND AND RELATED MATERIALS | 2018年 / 88卷
基金：
英国工程与自然科学研究理事会;
关键词：
SINGLE-CRYSTAL-DIAMOND; SILICON MICRORING RESONATORS; RAMAN LASER; FABRICATION; PHOTONICS; GAP; NANOSTRUCTURES; NANOPHOTONICS; NANOCAVITY; NETWORKS;
D O I：
10.1016/j.diamond.2018.07.020
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices has the potential to service many applications, spanning non-linear optics to quantum photonics with embedded diamond colour centres. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1 mu m thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.
引用
收藏
页码：215 / 221
页数：7
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