[1] Chinese Acad Sci, Engn Res Ctr Semicond Integrated Technol, Inst Semicond, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100190, Peoples R China
[4] Univ Chinese Acad Sci, Sch Microelect, Beijing 100190, Peoples R China
[5] Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China
[6] Beijing Engn Res Ctr Semicond Micronano Integrate, Beijing 100083, Peoples R China