Monolithic ultra-high-Q lithium niobate microring resonator

被引:736
作者
Zhang, Mian [1 ]
Wang, Cheng [1 ]
Cheng, Rebecca [1 ,2 ]
Shams-Ansari, Amirhassan [1 ,3 ]
Loncar, Marko [1 ]
机构
[1] Harvard Univ, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Brown Univ, Dept Phys, Providence, RI 02912 USA
[3] Howard Univ, Dept Elect Engn & Comp Sci, Washington, DC 20059 USA
基金
美国国家科学基金会;
关键词
CHIP; SILICON;
D O I
10.1364/OPTICA.4.001536
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides with extracted propagation losses as low as 2.7 dB/m and microring resonators with quality factors up to 10(7). (C) 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:1536 / 1537
页数:2
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