Mechanical design of micromachined silicon resonators

被引：0
|
作者：
Beeby, SP [1 ]
Tudor, MJ [1 ]
机构：
[1] Univ Southampton, USITT, Southampton SO17 1BJ, Hants, England
来源：
EUROSENSORS XII, VOLS 1 AND 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents a detailed study of the design of micromachined silicon resonators. Minimising energy losses through a resonator's supports improves the Q-factor of the device and improves the level of isolation of the resonator from surrounding structural influences. Finite element analysis has been applied to optimise the resonator design. Resonators have been evaluated on an optical fibre interferometer and results confirm the use of FE techniques as a powerful method of improving resonant sensor performance.
引用
收藏
页码：385 / 388
页数：4
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