X-ray fluorescence spectrometric determination of impurity elements in beryllium oxide

X-ray fluorescence spectrometry was applied to the determination of 12 impurity elements in BeO. Calibration standards were manually synthesized from spectral-pure reagents and analytical sample discs were prepared by powder-briqueting. Considering the transparency of BeO to X-ray, a molybdenum pad was laid between the sample disc and the sample supporter of a sample holder to eliminate the interference of spectrum from the sample holder and to produce additional emission for increasing sensitivity. The results analyzed by this method were in good agreement with those obtained by inductively coupled plasma-atomic emission spectroscopy and atomic absorption spectroscopy.