Electromigration behavior under a unidirectional time-dependent stress

被引:4
|
作者
Dwyer, VM
机构
[1] Dept. of Electron. and Elec. Eng., Loughborough Univ. of Technology, Loughboroueh
关键词
D O I
10.1109/16.502118
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The problem of current induced electromigration in VLSI interconnects, under an arbitrary time-dependent stress, is considered within the drift/diffusion model, It is shown that, by transforming into the convected frame and solving the resulting moving boundary problem, the vacancy build-up may be followed by solving two coupled integral equations. The important large-time behavior is obtained using standard asymptotic techniques. A series solution and an approximate small-time solution are also derived. It is found that, for a unidirectional periodic stress, the equivalent de current, appropriate to EM reliability tests is the periodic average value, In addition a design rule for arbitrary time-dependent stress is suggested.
引用
收藏
页码:877 / 882
页数:6
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