Microreactors and microfluidic systems:: an innovative approach to gas sensing using tin oxide-based gas sensors

被引:9
作者
Becker, T
Mühlberger, S
Bosch-vonBraunmühl, C
Müller, G
Meckes, A
Benecke, W
机构
[1] DaimlerChrysler AG, Res & Technol, D-81663 Munich, Germany
[2] Univ Bremen, Inst Microsensors Acutators & Syst, D-28334 Bremen, Germany
关键词
microreactor; microfluidic system; tin oxide gas sensor; microchamber;
D O I
10.1016/S0925-4005(01)00671-2
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A highly innovative approach of using tin oxide-based gas sensors is presented. Miniaturised tin oxide gas sensors were mounted inside micromachined cavities to form microreactors. These microreactors, with an internal volume of 45 mul, are surrounded by a microfluidic system containing valves and pumps. As already known [1] tin oxide-based gas sensors are highly sensitive towards oxidising and reducing gas species but there is a lack of selectivity and a certain amount of baseline drift. We show how smart microfluidic systems are able to solve these problems by operating microreactor systems alternately in constant-flow and no-flow modes of operation. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:48 / 54
页数:7
相关论文
共 8 条
[1]   Ozone detection using low-power-consumption metal-oxide gas sensors [J].
Becker, T ;
Tomasi, L ;
Bosch-von Braunmühl, C ;
Müller, G ;
Fagli, G ;
Comini, E .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) :229-232
[2]   Air pollution monitoring using tin-oxide-based microreactor systems [J].
Becker, T ;
Mühlberger, S ;
Bosch-von Braunmühl, C ;
Müller, G ;
Ziemann, T ;
Hechtenberg, KV .
SENSORS AND ACTUATORS B-CHEMICAL, 2000, 69 (1-2) :108-119
[3]  
BECKER T, 2000, P 8 INT M CHEM SENS
[4]  
MECKES A, 1999, SENSOR ACTUAT A-PHYS, V76, P482
[5]  
Moseley P.T., 1991, TECHNIQUES MECH GAS, VVolume 234
[6]  
MULLER G, 2000, P 38 TUTZ S CHEM NAN
[7]  
PEREGO C, 1996, MICRO SYSTEM TECHNOL, P29
[8]   Gas-kinetic interactions of nitrous oxides with SnO2 surfaces [J].
Ruhland, B ;
Becker, T ;
Muller, G .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 50 (01) :85-94