Self-organized ZnO nanodot arrays: Effective control using SiNx interlayers and low-temperature plasmas

被引：40

作者：

Huang, S. Y. ^{[1
,2
]}

Cheng, Q. J. ^{[3
,4
]}

Xu, S. ^{[1
,2
]}

Wei, D. Y. ^{[1
,2
]}

Zhou, H. P. ^{[1
,2
]}

Long, J. D. ^{[5
]}

Levchenko, I. ^{[3
,4
]}

Ostrikov, K. ^{[3
,4
]}

机构：

[1] Nanyang Technol Univ, Plasma Sources & Applicat Ctr, NIE, Singapore 637616, Singapore

[2] Nanyang Technol Univ, Inst Adv Studies, Singapore 637616, Singapore

[3] CSIRO Mat Sci & Engn, Lindfield, NSW 2070, Australia

[4] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[5] Natl Univ Singapore, Solar Energy Res Inst Singapore SERIS, Singapore 117574, Singapore

来源：

JOURNAL OF APPLIED PHYSICS | 2012年 / 111卷 / 03期

基金：

澳大利亚研究理事会; 中国国家自然科学基金; 新加坡国家研究基金会;

关键词：

QUANTUM DOTS; FABRICATION; GROWTH; FREQUENCY; OPERATION; DENSITY; LAYER; RAMAN;

D O I：

10.1063/1.3673593

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. (C) 2012 American Institute of Physics. [doi:10.1063/1.3673593]

引用

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