GaAsP pn diode on Si substrate grown by metalorganic molecular beam epitaxy for visible light-emitting devices

被引:1
作者
Yoshimoto, M [1 ]
Itoh, M
Saraie, J
Yasui, T
Ha, S
Kurobe, T
Matsunami, H
机构
[1] Kyoto Inst Technol, Dept Elect & Informat Sci, Kyoto 6068585, Japan
[2] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6068501, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 6A期
关键词
GaAsP; light-emitting diode; heteroepitaxy on Si; luminescence; metalorganic molecular beam epitaxy;
D O I
10.1143/JJAP.40.3953
中图分类号
O59 [应用物理学];
学科分类号
摘要
Luminescent GaAs1-xPx (0.2 < x < 0.7) was grown on a Si substrate by metalorganic molecular beam epitaxy (MOMBE). The insertion of a GaP buffer layer grown at a low temperature was essential to obtain luminescent GaAsP on Si. The growth condition of the GaP buffer layer was optimized based on the results of atomic force microscopy, reflection high-energy electron diffraction, and X-ray diffraction. Chemical and thermal treatments of the Si substrate were also carefully examined to obtain a flat surface and a sharp X-ray rocking curve of the GaAsP epilayer. The GaAsP epilayer on Si emits photoluminescence ascribed to the donor acceptor pair emission at a low temperature, and to a band-edge emission at room temperature. The GaAsP epilayer was doped for both n- and p-types with carrier concentrations up to 2 x 10(18) and 6 x 10(19) cm(-3), respectively. A GaAsP pn junction on a Gap substrate with a total thickness of 1.25 mum shows bright electroluminescence, indicating a tough nature against the large lattice mismatch. The preliminary GaAsP pn junctions on Si showed infrared and visible luminescence at room temperature.
引用
收藏
页码:3953 / 3959
页数:7
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