Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing

被引：4

作者：

Megat Hasnan, M. M., I ^{[1
]}

Nayan, N. ^{[2
]}

Ahmad, M. K. ^{[1
]}

Mohd Zin, R. ^{[1
]}

Fhong, S. C. ^{[1
]}

Said, S. M. ^{[3
]}

Mohamed Ali, M. S. ^{[4
]}

Mohd Sabri, M. F. ^{[3
]}

Mohamad, K. A. ^{[1
]}

Mohd Salleh, M. F. ^{[3
]}

机构：

[1] Univ Tun Hussein Onn, Fac Elect & Elect Engn, Dept Elect Engn, Batu Pahat 86400, Johor, Malaysia

[2] Univ Tun Hussein Onn Malaysia, Microelect & Nanotechnol Shamsuddin Res Ctr MiNT, Block F5, Batu Pahat 86400, Johor, Malaysia

[3] Univ Malaya, Fac Engn, Kuala Lumpur 50603, Malaysia

[4] UTM, Sch Elect Engn, Johor Baru 81310, Johor, Malaysia

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2021年 / 36卷 / 11期

关键词：

thermoelectrochemical cell; low heat waste; stability; repeatability; micro-power;

D O I：

10.1088/1361-6641/ac22f3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thermoelectrochemical cells (TECs) are an alternative with potential for micro-power generator applications but is rarely fabricated using semiconductor processes or micro-fabrication technology. This study initiates fabrication of a Si-based TEC cell device using micro-fabrication technology. The iodide/triiodide poly(vinyl alcohol) hydrogel polymer electrolyte, and citric acid as supporting electrolyte, is selected as the TEC material. A platinum electrode sputtered on a silicon substrate is used as the hot and cold electrode. The TEC voltage generation that is based on Soret diffusion and the Seebeck effect shows good repeatability and stability. The magnitude of the power density shows dependence on the device electrode separation and temperature difference. At 10 mm electrode separation and a temperature difference of 30 K, the Si substrate TEC is able to produce 310 mu W m(-2); thus, it shows high potential as a low heat waste Si-based TEC power generator.

引用

页数：10