Formation of wire-like surfaces and lateral composition modulation in GaAsN grown by metalorganic molecular-beam epitaxy

被引:15
作者
Suemune, I
Morooka, N
Uesugi, K
Ok, YW
Seong, TY
机构
[1] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 0600825, Japan
[2] Kwangju Inst Sci & Technol, K JIST, Dept Mat Sci & Engn, Kwangju 500712, South Korea
关键词
wire structures; III-V-N; lateral superlattice; facet; MOMBE;
D O I
10.1016/S0022-0248(00)00775-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Wire-like structures are found to form on the GaAsN surfaces. The wire heights and intervals are dependent on the N composition and are typically similar to 10 and similar to 50 nm, respectively. The wires were facetted with (1 1 n)A crystal planes, where a value of "n" is in the range of 3-9 and is reduced with increasing N composition. Transmission electron microscopic examination shows that the lateral compositional modulation is correlated with the surface-wire-like structure. The formation mechanism is discussed based on the site-selective N incorporation at the A-steps on the wired surfaces. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:546 / 550
页数:5
相关论文
共 10 条
[1]   Effects of atomic short-range order on the electronic and optical properties of GaAsN, GaInN, and GaInAs alloys [J].
Bellaiche, L ;
Zunger, A .
PHYSICAL REVIEW B, 1998, 57 (08) :4425-4431
[2]   OBSERVATION OF STEP BUNCHING ON VICINAL GAAS(100) STUDIED BY SCANNING-TUNNELING-MICROSCOPY [J].
HATA, K ;
KAWAZU, A ;
OKANO, T ;
UEDA, T ;
AKIYAMA, M .
APPLIED PHYSICS LETTERS, 1993, 63 (12) :1625-1627
[3]   GaInNAs: A novel material for long-wavelength-range laser diodes with excellent high-temperature performance [J].
Kondow, M ;
Uomi, K ;
Niwa, A ;
Kitatani, T ;
Watahiki, S ;
Yazawa, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (2B) :1273-1275
[4]  
KONDOW M, 1999, JPN J APPL PHYS, V38, P1355
[5]   DEFECTS IN EPITAXIAL MULTILAYERS .1. MISFIT DISLOCATIONS [J].
MATTHEWS, JW ;
BLAKESLEE, AE .
JOURNAL OF CRYSTAL GROWTH, 1974, 27 (DEC) :118-125
[6]  
PETROFF PM, 1977, J VAC SCI TECHNOL, V14, P473
[7]   Nitrogen atomic-layer-doping on Ga-terminated and misoriented GaAs surfaces by metalorganic vapor phase epitaxy using dimethylhydrazine [J].
Saito, H ;
Makimoto, T ;
Kobayashi, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (12B) :L1644-L1647
[8]   ROLE OF A METALORGANIC AS SOURCE IN ATOMIC LAYER EPITAXY OF GAAS AND ALAS [J].
SUEMUNE, I .
APPLIED SURFACE SCIENCE, 1994, 82-3 :149-157
[9]   Reexamination of N composition dependence of coherently grown GaNAs band gap energy with high-resolution x-ray diffraction mapping measurements [J].
Uesugi, K ;
Morooka, N ;
Suemune, I .
APPLIED PHYSICS LETTERS, 1999, 74 (09) :1254-1256
[10]   Metalorganic molecular beam epitaxy of GaNAs alloys on (001)GaAs [J].
Uesugi, K ;
Suemune, I .
JOURNAL OF CRYSTAL GROWTH, 1998, 189 :490-495