A new approach for 3D reconstruction from bright field TEM imaging: Beam precession assisted electron tomography

被引：33

作者：

Rebled, J. M. ^{[1
,3
]}

Yedra, Ll. ^{[1
]}

Estrade, S. ^{[1
,2
]}

Portillo, J. ^{[1
,2
]}

Peiro, F. ^{[1
]}

机构：

[1] Univ Barcelona, LENS MIND IN2UB, Dept Elect, E-08028 Barcelona, Spain

[2] CCiT UB, TEM MAT, Barcelona 08028, Spain

[3] Inst Ciencia Mat Barcelona CSIC, Bellaterra 08193, Spain

来源：

ULTRAMICROSCOPY | 2011年 / 111卷 / 9-10期

关键词：

Electron beam precession; Electron tomography; Diffraction contrast; Transmission electron microscopy; Defects; AUTOMATED DIFFRACTION TOMOGRAPHY; CRACK-TIP DISLOCATIONS; SURFACE-ROUGHNESS; PART II; MOBILITY; TEMPERATURE; CHANNELS; GROWTH;

D O I：

10.1016/j.ultramic.2011.06.002

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The successful combination of electron beam precession and bright field electron tomography for 3D reconstruction is reported. Beam precession is demonstrated to be a powerful technique to reduce the contrast artifacts due to diffraction and curvature in thin foils. Taking advantage of these benefits, Precession assisted electron tomography has been applied to reconstruct the morphology of Sn precipitates embedded in an Al matrix, from a tilt series acquired in a range from +49 degrees to -61 degrees at intervals of 2 degrees and with a precession angle of 0.6 degrees in bright field mode. The combination of electron tomography and beam precession in conventional TEM mode is proposed as an alternative procedure to obtain 3D reconstructions of nano-objects without a scanning system or a high angle annular dark field detector. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：1504 / 1511

页数：8

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