FABRICATION OF MICRO PROBE-TYPE ELECTRODES FOR MICROELECTRO-CHEMICAL MACHINING USING MICROFABRICATION

被引：1

作者：

Park, W. B. ^{[1
]}

Choi, J. H. ^{[1
]}

Park, C. W. ^{[1
]}

Kim, G. M. ^{[1
]}

Shin, H. S. ^{[2
]}

Chu, C. N. ^{[2
]}

Kim, B. H. ^{[3
]}

机构：

[1] Kyungpook Natl Univ, Sch Mech Engn, Taegu 702701, South Korea

[2] Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul, South Korea

[3] Soongsil Univ, Dept Mech Engn, Seoul, South Korea

来源：

INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2010年 / 24卷 / 15-16期

关键词：

Micro-electro-chemical machining (MECM); microfabrication; micro-electrode;

D O I：

10.1142/S0217979210065398

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools for various electrical micromachining of steel mold and parts of microdevices.

引用

页码：2639 / 2644

页数：6

共 4 条

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