High aspect ratio surface relief structures by photoembossing

被引:33
|
作者
Hermans, Ko
Wolf, Florian K.
Perelaer, Jolke
Janssen, Rene A. J.
Schubert, Ulrich S.
Bastiaansen, Cees W. M.
Broer, Dirk J.
机构
[1] Eindhoven Univ Technol, Dept Chem Engn, NL-5600 MB Eindhoven, Netherlands
[2] Philips Res Labs, NL-5656 AE Eindhoven, Netherlands
关键词
D O I
10.1063/1.2799744
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photoembossing is a convenient and economical process to form complex surface relief structures in polymer thin films. We have improved the aspect ratio of photoembossed microstructures by adding t-butyl hydroquinone (TBHQ) to the polymerization mixture. The mechanism that is proposed is based on the radical transfer principle, where TBHQ converts acrylate radicals into stable phenol radicals that at elevated temperatures act as latent initiators, thereby controlling the kinetics without changing the number of polymerization active sites. As a result, the aspect ratio can be improved with a factor of 5 - 7 in comparison with previously proposed similar processes. (C) 2007 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 50 条
  • [1] Photoembossing of surface relief structures in polymer films for biomedical applications
    Hughes-Brittain, Nanayaa F.
    Qiu, Lin
    Wang, Wen
    Peijs, Ton
    Bastiaansen, Cees W. M.
    JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART B-APPLIED BIOMATERIALS, 2014, 102 (02) : 214 - 220
  • [2] One-Step Photoembossing for Submicrometer Surface Relief Structures in Liquid Crystal Semiconductors
    Liedtke, Alicia
    Lei, Chunhong
    O'Neill, Mary
    Dyer, Peter E.
    Kitney, Stuart P.
    Kelly, Stephen M.
    ACS NANO, 2010, 4 (06) : 3248 - 3253
  • [3] Manufacturing of Surface Relief Structures in Moving Substrates Using Photoembossing and Pulsed-Interference Holography
    Picot, Olivier T.
    Alcala, Rafael
    Sanchez, Carlos
    Dai, Mian
    Hughes-Brittain, Nanayaa F.
    Broer, Dirk J.
    Peijs, Ton
    Bastiaansen, Cees W. M.
    MACROMOLECULAR MATERIALS AND ENGINEERING, 2013, 298 (01) : 33 - 37
  • [4] Different methods to alter surface morphology of high aspect ratio structures
    Leber, M.
    Shandhi, M. M. H.
    Hogan, A.
    Solzbacher, F.
    Bhandari, R.
    Negi, S.
    APPLIED SURFACE SCIENCE, 2016, 365 : 180 - 190
  • [5] Photo-embossed Surface Relief Structures with an Increased Aspect Ratio by Addition of Kinetic Interfering Compounds
    Perelaer, Jolke
    Hermans, Ko
    Bastiaansen, Cees W. M.
    Broer, Dirk J.
    Schubert, Ulrich S.
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2009, 22 (05) : 667 - 670
  • [6] Mesoscale polymer arrays: high aspect ratio surface structures and their digital reconstruction
    Moed, Demi E.
    Dimitriyev, Michael S.
    Greenvall, Benjamin R.
    Grason, Gregory M.
    Crosby, Alfred J.
    SOFT MATTER, 2024, 20 (40) : 8023 - 8035
  • [7] Highly Efficient Surface Relief Formation via Photoembossing of a Supramolecular Polymer
    Hermans, Ko
    Tomatsu, Itsuro
    Matecki, Michael
    Sijbesma, Rint P.
    Bastiaansen, Cees W. M.
    Broer, Dirk J.
    MACROMOLECULAR CHEMISTRY AND PHYSICS, 2008, 209 (20) : 2094 - 2099
  • [8] Reducing collapse in high aspect ratio structures
    Zhou, Jie
    Liu, Gang
    Cui, Huanhuan
    Xiong, Ying
    Tian, Yangchao
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART N-JOURNAL OF NANOMATERIALS NANOENGINEERING AND NANOSYSTEMS, 2011, 225 (02) : 49 - 53
  • [9] High-aspect-ratio structures for MEMS
    Pang, SW
    MRS BULLETIN, 2001, 26 (04) : 307 - 308
  • [10] Plasma Doping of High Aspect Ratio Structures
    Raj, Deven
    Lee, Jun S.
    Maynard, Helen
    Lacey, Kerry
    2014 20TH INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2014), 2014,